DI(T-BUTYLAMINO)SILANE (BTBAS)
CAS NO.: 186598-40-3
Purity :99,8%
dioxomolybdenum,dihydrochloride (MoO2Cl2)
CAS NO.: 13637-68-8
Purity :99
Compound | DI(T-BUTYLAMINO)SILANE | ||||
---|---|---|---|---|---|
CAS No. | 186598-40-3 | Catalog No. | 8 | Brand | |
Purity | 99,8% | Packing | 5-10kg | Grade | |
Lead Time | Origin | Loading Port |
Boiling Point | 167ºC |
---|---|
Flash Point | 30ºC |
Density | 0.816 g/cm3 |
Vapor Pressure | 0.641mmHg at 25°C |
DI(T-BUTYLAMINO)SILANE (BTBAS) is a useful precursor used in lower temperatures Plasma Enhanced Atomic Layer Deposition (PLEALD). Aminosilanes are the best choice as Si source for the deposition of hafnium silicates (HfSiO) and hafnium silicon oxynitrides (HfSiON)
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