CAS NO.: 13465-77-5
Purity :99,99999%
CAS NO.: 13465-84-4
Purity :99%
DI(T-BUTYLAMINO)SILANE (BTBAS)
CAS NO.: 186598-40-3
Purity :99,8%
dioxomolybdenum,dihydrochloride (MoO2Cl2)
CAS NO.: 13637-68-8
Purity :99
CAS NO.: 7789-66-4
Purity :99,85
| Compound | Hexachlorodisilane | ||||
|---|---|---|---|---|---|
| CAS No. | 13465-77-5 | Catalog No. | 1 | Brand | |
| Purity | 99,99999% | Packing | 17.5kg | Grade | |
| Lead Time | Origin | Loading Port | |||
| Boiling Point | 144-145.5ºC(lit.) |
|---|---|
| Stability | Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, alcohols. |
| Storage Condition | below 5ºC |
| Appearance & Physical State | colourless liquid |
| Flash Point | 78°C |
| Refractive Index | n20/D 1.475(lit.) |
| Density | 1.597g/cm3 |
| Melting Point | <0ºC |
| Vapor Pressure | 6.39mmHg at 25°C |
Hexachiorodisiiane (HCDS) is a liquid precursor used in low-temperature CVD/ALD or PEALD (Plasma Enhanced ALD) for conformal silicon oxide and silicon nitride films deposition. Silicon nitride and silicon dioxide are some of the most widely used dielectric materials in Si microelectronics processing.
| No. | Description | Update Time | Operation |
|---|---|---|---|
| 1 | Certificate of Authenticity | 2021/10/22 | Download |
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