DI(T-BUTYLAMINO)SILANE (BTBAS)
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Compound | trichloro(trichlorosilyloxy)silane | ||||
---|---|---|---|---|---|
CAS No. | 14986-21-1 | Catalog No. | 6 | Brand | |
Purity | 99,85 | Packing | 1-10kg | Grade | |
Lead Time | Origin | Loading Port |
Boiling Point | 137ºC(lit.) |
---|---|
Appearance & Physical State | Clear colorless to light yellow liquid |
Flash Point | 18 °C |
Refractive Index | n20/D 1.428(lit.) |
Density | 1.63g/cm3 |
Melting Point | <0ºC |
Vapor Pressure | 9.01mmHg at 25°C |
HCDSO also is a high purity precursor for the deposition of Si-based films. Hexachlorodisiloxane, reacting with primary and secondary amines leads, dependent on stoichiometry, to numerous partially and totally or organylamino substituted disiloxanes.
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